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PRODUCTION TRIANGULAR VOLTAGE SWEEP (TVS) OPTION
In traditional TVS measurements, the operator must select the end points of the mobile ion peak to determine the area to analyze. Though the selection of these points is a simple matter for the operator, the required input precludes using this technique in a semi-autonomous production environment. The goal of TVS Production testing is the rapid determination of mobile charge concentration with little or no operator input. The test methodology must be compatible with production environments where accuracy, ease of use, and minimum operator involvement are of paramount concern. Also, the possibility of automated wafer handling must be considered. By incorporating multiple frequencies, the proprietary MDC Production TVS software can automatically select the correct end points, analyze, and store the results all without operator assistance. This allows for a higher throughput with greater accuracy and repeatability.
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